RTP-1100D4 rapid heating furnace

Detailed Product Description

RTP-1000D4 is compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange.  It is designed for annealing semiconductor wafer ro solar cell up to 3" diameter.  RTP-4 is heated by 10KW halogen light  with max. 120^oC/second heating rate.  50 segment precision temperature controller is built in with +/-1^oC. accuracy.  RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.

Specifications:

• Furnace structure:         Double layer steel case with mullite liner without water cooling or air cooling
• Heating element:          8 pcs  Halogen light  tube  ( D=10 L=300 T =200, mm )
• Heating zone:               12" length with 4" constant temperature zone within +/-1^oC uniformity
• Quart Tube size:           4.33" O.D x 4.05" I.D x 15" Length
• Vacuum Flange:           Made of stainless steel with double hi-temp. silicone O-ring, ball valves and water cooling jacket 
  • only require water cooling in long    time running at > 900^oC
  • Circulating water rate: 0.5 m³ /hr
• Vacuum pressure:         Depended on pressure limit   ( pump not included, please click underlined to order separately )
• Vacuum gauge (optional):  CE certified with a measurement range from 10 mtorr~1000 torr.
• Flow meter (optional): , 6-60/100 cc/min. with 1/4 NPT male fitting

• Temperature control:     PID automatic control via power control, e.g. current limiting phase angle fired the resistor.
  • 30 segments programmable precision controller with auto tune function
  • Built in protection from overheated and broken thermal couple
  • Temperature control accuracy: +/- 0.5^oC
  • Built in RS485 port for PC control
  • Software is included  ( Window XP English version required, computer is not included, but 9" screen laptop with operation software installed is available as option at $600 extra cost )
• Max. Heating Rate:         50 ^oC/sec  recommended, and 120^oC/sec. for short time
• Working Temperature:     1000^oC Max.
• Power Input:                   208-240 AC, 50/60 Hz single phase,   9 KW Max.  ( > 60A breaker required)
• Dimension:                    760 X 330 X 530 mm  (  30"W x 13"L x 21" H )
• Net weight:                    45 kg   ( 100 lbs )
• Warranty:                      One year limited    ( not including halogen light damaged by user )